• Costumized design & layout
  • Microsystems for biochemical applications
  • Expertise in Finite Element Modeling and Electro-mechanical Simulation
  • Device realization using MEMS CMOS fabrication processes
  • Off-line device testing of final prototypes

The MicroSystems Technology (MST) Research Unit integrates  the former MEMS and BioMEMS Research Units. 

The research activity of the Unit is oriented to the design and fabrication of microsystems, microdevices and sensors. The main activities are concentrated on one side on biomedical, environmental and agrofood applications and on the other side on MEMS devices development for radiofrequency transmission and control.