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Hybrid High-Q MEMS resonator based on SOI Technology for High Performance Oscillators
This activity aims at design, manufacture, test and evaluation of high quality oscillators based on MEMS resonators based on european MEMS technology in the 10 MHz to 500 MHz frequancy range.
- Fondazione Bruno Kessler (Italy)
- RFMicrotech (Italy)
ESA/ESTEC funded project
- Coordination of the project
- Design Fabrication and Testing of the MEMS resonators