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Benno Margesin

Researcher
  • Phone: 0461314490
  • FBK Povo
Short bio

Benno Margesin was born in Bolzano, Italy, in December 1955. He received the doctor degree in physics, in 1980, from the University of Bologna with a thesis on electron optics applied to the electron microscopy. He joined the Istituto Trentino di Cultura of Trento in 1982 and started his activity as a researcher of the ion implantation group. Within the ion implantation group he was involved in the design and development of heavy ion sources and of electron-optical elements for heavy ion implanter. He joined in 1987 the Integrated Circuits Fabrication Laboratory, now the Microsystem Division (MIS) of ITC-irst, where led the ion implantation and furnace group. Since 1992 he is also involved in the development of sensors and the study of micromechanics. In particular he developed physical and chemical sensors and there fabrication processes, as there are cryogenic microcalorimeter, ISFETs, LAPS, biosensors, pressure sensors, microelectrodes and passive components for microwave circuits, for applications in research and industry. In 1997 he became the leader of the BioMEMS group at ITC-irst (now FBK).His activity on RF MEMS devices dates back to the beginning of the INCO COPERNICUS Project No. 977131 "Micromachined circuits for microwave and millimeter wave applications - MEMSWAVE". where he collaborated in the development of low loss passive RF components. Starting from 2001 his major involvement is in the development of a technology platform for RF switches, first with in the ESA/ESTEC Contract Nr. 14628/NL/CK-MEM Switch as a subcontractor of Alcatel Alenia Space and then within the NoE AMICOM, where he is currently working on the optimization and extension of the RF switch technology platform.In 2006 he becomes the head of the MEMS group of the MIS (MicroSystems) Division at ITC-irst. From January 2008 till December 2008 he lead the MEMSRad Research Unit and from January 2009 till December 2013 he was the head of the MEMS Research Unit in FBK. At present his scientific interest is related to development of RF passive components on silicon (switches), capacitive silicon microphones, bolometres and physical sensors for consumer and industrial applications.
He is co-author of invited talks of national and international conferences. He is also co-inventor of a patent in the field of biomedical devices for the measurement of the metabolic activity of living cells.

Research interests
RFMEMS criogenic bolometers Microfabrication technology microthrusters
Publications
  1. D. Vasilache; S. Colpo; M. Chistè; F. Giacomozzi; B. Margesin,
    Conductive through silicon via holes for RF applications,
    Proceedings Diaspora in Scientific Research and Universities in Romania,
    2012
    , (Diaspora in Scientific Research and Universities in Romania,
    Bucharest, Romania,
    da 25/09/2012 a 28/09/2012)
  2. D. Vasilache; M. Chistè; S. Colpo; F. Giacomozzi; B. Margesin,
    Wafer resistivity influence over DRIE processes for TSVs manufacturing,
    vol.1,
    2012
    , pp. 175-
    178
    , (2012 International Semiconductor Conference (CAS 2012),
    Sinaia, Romania,
    15-17 October)
  3. A.Q.A. Qureshi; S. Colpo; D. Vasilache; S. Girardi; P. Conci; B. Margesin,
    Thermocompression bonding for 3D RF MEMS devices using gold and silver as intermediate layer,
    vol.1,
    2012
    , pp. 183-
    186
    , (2012 International Semiconductor Conference (CAS 2012),
    Sinaia, Romania,
    15-17 October)
  4. Michalas L.; Koutsoureli M.; Papandreou E.; Papaioannou G.; Giacomozzi F.; Colpo S.; Margesin B.,
    Proceedings of the 7th European Microwave Integrated Circuits Conference,
    Louvaine-la-Neuve,
    EuMA,
    2012
    , pp. 36-
    39
    , (The 7th European Microwave Integrated Circuits Conference EuMIC 2012,
    Amsterdam, the Netherlands,
    da 10/29/2012 a 10/30/2012)
  5. Solazzi, Francesco; Palego, Cristiano; Molinero, David; Farinelli, Paola; Colpo, Sabrina; Hwang, James C. M.; Margesin, Benno; Sorrentino, Roberto,
    7th EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC),
    2012
    , pp. 32-
    35
    , (7th European Microwave Integrated Circuits Conference (EuMIC),
    Amsterdam,
    29-30 Oct. 2012)
  6. Farinelli, P.; El Ghannudi, H.; Resta, G.; Margesin, B.; and Erspan, M.; and Sorrentino, R.,
    42ND EUROPEAN MICROWAVE CONFERENCE (EUMC),
    2012
    , pp. 186-
    189
    , (42nd European Microwave Conference (EuMC),
    Amsterdam,
    Oct. 29 2012-Nov. 1 2012)
  7. A. Massenz; M. Barbato; V. Giliberto; B. Margesin; S. Colpo; G. Meneghesso,
    in «MICROELECTRONICS RELIABILITY»,
    vol. 51,
    2011
    , pp. 1887 -
    1891
  8. F. Solazzi; A. Tazzoli; P. Farinelli; A. Faes; V. Mulloni; B. Margesin; G. Meneghesso,
    Design and characterization of an active recovering mechanism for high-performance RF MEMS redundancy switches,
    in «INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES»,
    vol. 3,
    2011
    , pp. 539 -
    546
  9. F. Solazzi; C. Palego; S. Halder; J.C.M. Hwang; A. Faes; V. Mulloni; B. Margesin; P. Farinelli; R. Sorrentino,
    Effect of the substrate on RF power-handling capability of micro-electromechanical capacitive switches,
    in «SOLID-STATE ELECTRONICS»,
    vol. 65-66,
    2011
    , pp. 219 -
    225
  10. F. Giacomozzi; V. Mulloni; S. Colpo; J. Iannacci; B. Margesin; A. Faes,
    in «ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY»,
    vol. 14,
    n. 3,
    2011
    , pp. 259 -
    268

Pages