You are here

Benno Margesin

  • Phone: 0461314490
  • FBK Povo
Short bio

Benno Margesin was born in Bolzano, Italy, in December 1955. He received the doctor degree in physics, in 1980, from the University of Bologna with a thesis on electron optics applied to the electron microscopy. He joined the Istituto Trentino di Cultura of Trento in 1982 and started his activity as a researcher of the ion implantation group. Within the ion implantation group he was involved in the design and development of heavy ion sources and of electron-optical elements for heavy ion implanter. He joined in 1987 the Integrated Circuits Fabrication Laboratory, now the Microsystem Division (MIS) of ITC-irst, where led the ion implantation and furnace group. Since 1992 he is also involved in the development of sensors and the study of micromechanics. In particular he developed physical and chemical sensors and there fabrication processes, as there are cryogenic microcalorimeter, ISFETs, LAPS, biosensors, pressure sensors, microelectrodes and passive components for microwave circuits, for applications in research and industry. In 1997 he became the leader of the BioMEMS group at ITC-irst (now FBK).His activity on RF MEMS devices dates back to the beginning of the INCO COPERNICUS Project No. 977131 "Micromachined circuits for microwave and millimeter wave applications - MEMSWAVE". where he collaborated in the development of low loss passive RF components. Starting from 2001 his major involvement is in the development of a technology platform for RF switches, first with in the ESA/ESTEC Contract Nr. 14628/NL/CK-MEM Switch as a subcontractor of Alcatel Alenia Space and then within the NoE AMICOM, where he is currently working on the optimization and extension of the RF switch technology platform.In 2006 he becomes the head of the MEMS group of the MIS (MicroSystems) Division at ITC-irst. From January 2008 till December 2008 he lead the MEMSRad Research Unit and from January 2009 till December 2013 he was the head of the MEMS Research Unit in FBK. At present his scientific interest is related to development of RF passive components on silicon (switches), capacitive silicon microphones, bolometres and physical sensors for consumer and industrial applications.
He is co-author of invited talks of national and international conferences. He is also co-inventor of a patent in the field of biomedical devices for the measurement of the metabolic activity of living cells.

Research interests
RFMEMS criogenic bolometers Microfabrication technology microthrusters
  1. Andrea Lucibello;Romolo Marcelli;Emanuela Proietti;Giancarlo Bartolucci;Viviana Mulloni;Benno Margesin,
    Reliability of RF MEMS capacitive and ohmic switches for space redundancy configurations,
  2. Cherman, Vladimir O.; Pham, Nga P.; Slabbekoorn, John; Faes, Alessandro; Margesin, Benno; Tilmans, Harrie A.C.,
    Performance and Perspectives of Zero-Level MEMS Chip Packages with Vertical Interconnects,
    vol. 11,
    n. 3,
    , pp. 87 -
  3. Mulloni V.; Giacomozzi F.; Resta G.; Margesin B.,
    Long-term reliability of RF-MEMS dielectric-less capacitive switches,
    Micro Electro Mechanical Systems for Microwave amd Millimeter Wave Circuits,
    Editura Academiei Romane,
    , pp. 81 -
  4. Qureshi A. Q. A.; Pelliccia L.; Colpo S.; Giacomozzi F.; Farinelli P.; Margesin B.,
    3D Micromachined Ka (30 GHz) Band RF MEMS Filter for On-Board Satellite Communication Systems,
    Micro Electro Mechanical Systems for Microwave amd Millimeter Wave Circuits,
    Editura Academiei Romane,
    , pp. 127 -
  5. Lucibello A.; Capoccia G.; Proietti E.; Marcelli R.; Margesin B.; Mulloni V.; Giacomozzi F.; Vitulli F.; Scipioni M.; Bartolucci G.,
    Reliable response of RF MEMS LTCC packaged
    switches after mechanical and thermal stress
    Proceedings of DTIP 2014,
    EDA Publishing,
    , pp. 196-
    , (DTIP 2014,
    Cannes (France),
    1-4 April 2014)
  6. Giacomozzi F.; Mattedi F; Farinelli P.; Margesin B.; Resta G.; Mulloni V.,
    Assessment of ORDYL SY 355 dry film for
    RF MEMS 0-level packaging
    Proceedings of MEMSWAVE 2014,
    , (15th International Symposium on RF-MEMS and RF-Microsystems MEMSWAVE 2014,
    La Rochelle, France,
    30 June - 2 July 2014)
  7. Barbato M.; Cester A.; Mulloni V.; Margesin B.; De Pasquale G.; Soma A.; Meneghesso G.,
    Reliability of capacitive RF MEMS switches subjected to repetitive impact cycles at different temperatures,
    Proceedings of ESSDERC 2014,
    , (ESSDERC 2014 - 44th European Solid-State Conference,
    Venice, Italy,
    September 22-26, 2014)
  8. Franco Diaferia; Francois Deborgies; Sergio Di Nardo; Beatrice Espana; Paola Farinelli; Andrea Lucibello; Romolo Marcelli; Benno Margesin; Flavio Giacomozzi; Larissa Vietzorreck; Francesco Vitulli,
    Compact 12x12 Switch Matrix integrating RF MEMS switches in LTCC hermetic packages,
    Proceedings of the 44th European Microwave Conference,
    , pp. 199-
    , (44th European Microwave Conference,
    6-9 Oct 2014)
  9. V. Mulloni; S. Colpo; A. Faes; B. Margesin,
    A simple analytical method for residual stress measurement on
    suspended MEM structures using surface profilometry
    vol. 23,
    n. 2,
    , pp. 025025 -
  10. V. Mulloni; F. Solazzi; F. Ficorella; A. Collini; B. Margesin,
    Influence of temperature on the actuation voltage of RF-MEMS switches,
    vol. 53,
    n. 4,
    , pp. 706 -