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Benno Margesin

Researcher
  • Phone: 0461314490
  • FBK Povo
Short bio

Benno Margesin was born in Bolzano, Italy, in December 1955. He received the doctor degree in physics, in 1980, from the University of Bologna with a thesis on electron optics applied to the electron microscopy. He joined the Istituto Trentino di Cultura of Trento in 1982 and started his activity as a researcher of the ion implantation group. Within the ion implantation group he was involved in the design and development of heavy ion sources and of electron-optical elements for heavy ion implanter. He joined in 1987 the Integrated Circuits Fabrication Laboratory, now the Microsystem Division (MIS) of ITC-irst, where led the ion implantation and furnace group. Since 1992 he is also involved in the development of sensors and the study of micromechanics. In particular he developed physical and chemical sensors and there fabrication processes, as there are cryogenic microcalorimeter, ISFETs, LAPS, biosensors, pressure sensors, microelectrodes and passive components for microwave circuits, for applications in research and industry. In 1997 he became the leader of the BioMEMS group at ITC-irst (now FBK).His activity on RF MEMS devices dates back to the beginning of the INCO COPERNICUS Project No. 977131 "Micromachined circuits for microwave and millimeter wave applications - MEMSWAVE". where he collaborated in the development of low loss passive RF components. Starting from 2001 his major involvement is in the development of a technology platform for RF switches, first with in the ESA/ESTEC Contract Nr. 14628/NL/CK-MEM Switch as a subcontractor of Alcatel Alenia Space and then within the NoE AMICOM, where he is currently working on the optimization and extension of the RF switch technology platform.In 2006 he becomes the head of the MEMS group of the MIS (MicroSystems) Division at ITC-irst. From January 2008 till December 2008 he lead the MEMSRad Research Unit and from January 2009 till December 2013 he was the head of the MEMS Research Unit in FBK. At present his scientific interest is related to development of RF passive components on silicon (switches), capacitive silicon microphones, bolometres and physical sensors for consumer and industrial applications.
He is co-author of invited talks of national and international conferences. He is also co-inventor of a patent in the field of biomedical devices for the measurement of the metabolic activity of living cells.

Research interests
RFMEMS criogenic bolometers Microfabrication technology microthrusters
Publications
  1. A. Lucibello;G. Capoccia;E. Proietti;R. Marcelli;B. Margesin;V. Mulloni;F. Giacomozzi;F. Vitulli;M. Scipioni;G. Bartolucci,
    in «MICROSYSTEM TECHNOLOGIES»,
    2015
  2. Barbato, Marco; Cester, Andrea; Mulloni, Viviana; Margesin, Benno; Meneghesso, Gaudenzio,
    in «IEEE TRANSACTIONS ON ELECTRON DEVICES»,
    vol. 62,
    n. 11,
    2015
    , pp. 3825 -
    3831
  3. Cazzorla, Alessandro; Farinelli, Paola; Urbani, Laura; Cacciamani, Fabrizio; Pelliccia, Luca; Sorrentino, Roberto; Giacomozzi, Flavio; Margesin, Benno,
    in «INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES»,
    2015
    , pp. 1 -
    10
  4. Mulloni, Viviana; Margesin, Benno; Farinelli, Paola; Marcelli, Romolo; Lucibello, Andrea; De Angelis, Giorgio,
    in «MICROSYSTEM TECHNOLOGIES»,
    2015
    , pp. 1 -
    8
  5. Cazzorla, A.; Farinelli, P.; Sorrentino, R.; Margesin, B.,
    in «MICROELECTRONICS RELIABILITY»,
    vol. 55,
    n. 9-10,
    2015
    , pp. 1906 -
    1910
  6. Biassoni, M.; Brofferio, C.; Capelli, S.; Cassina, L.; Clemenza, M.; Cremonesi, O.; Faverzani, M.; Ferri, E.; Giachero, A.; Gironi, L.; Giordano, C.; Gotti, C.; Maino, M.; Margesin, B.; Nucciotti, A.; Pavan, M.; Pessina, G.; Previtali, E.; Puiu, A.; Sisti, M.; Terranova, F.,
    in «THE EUROPEAN PHYSICAL JOURNAL. C, PARTICLES AND FIELDS»,
    vol. 75,
    n. 10,
    2015
  7. V. Mulloni;G. Resta; F. Giacomozzi;B. Margesin,
    Influence of fabrication tolerances on the reliability of RF-MEMS capacitive switches2015 XVIII AISEM Annual Conference,
    2015 XVIII AISEM Annual Conference,
    2015
    , pp. 1-
    4
    , (AISEM 2015,
    Trento,
    3-5 February 2015)
  8. F. Giacomozzi;V. Mulloni;G. Resta;B. Margesin,
    MEMS packaging by using dry film resist2015 XVIII AISEM Annual Conference,
    2015 XVIII AISEM Annual Conference,
    2015
    , pp. 1-
    4
    , (AISEM 2015,
    Trento,
    3-5 February 2015)
  9. F. Quaranta; A. Persano; G. Capoccia; A. Taurino; A. Cola; P. Siciliano; A. Lucibello; R. Marcelli; E. Proietti; A. Bagolini; B. Margesin; P. Bellutti; J. Iannacci,
    Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951705,
    SPIE,
    vol.9517,
    2015
    , pp. 1-
    8
    , (SPIE Microtechnologies 2015,
    Barcelona, Spain,
    4-6 May 2015)
  10. V. Mulloni; G. Sordo; B. Margesin,
    Smart Sensors, Actuators, and MEMS VII; and Cyber Physical SystemsSmart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems,
    vol.9517,
    2015
    , (SPIE 9517 Smart Sensors, Actuators, and MEMS VII,
    Barcelona, Spain,
    4-6 May 2015)

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